Patent Assignment
Reel/Frame 017812/0444
Assignment of Assignor's Interest
Recorded: 2006-06-16
Pages: 2
Assignors
LAUER, STEFFEN
Executed: 2006-05-31
WEGMANN, ULRICH
Executed: 2006-05-22
EMER, WOLFGANG
Executed: 2006-05-31
SAKOWSKI, HARALD
Executed: 2006-05-19
SCHRIEVER, MARTIN
Executed: 2006-06-01
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method of Determining Optical Properties and Projection Exposure System Comprising a Wavefront Detection System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.