Patent Assignment
Reel/Frame 017819/0477
Assignment of Assignor's Interest
Recorded: 2006-06-19
Pages: 3
Assignors
LALLY, KEVIN
Executed: 2006-06-07
FUNK, MERRITT
Executed: 2006-06-08
SUNDARARAJAN, RADHA
Executed: 2006-06-08
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER 3-6 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107, JAPAN
Covered Property
(1)
Damage Assessment of a Wafer Using Optical Metrology