Patent Assignment
Reel/Frame 017820/0607
Assignment of Assignor's Interest
Recorded: 2006-06-19
Pages: 3
Assignors
MANN, HANS-JURGEN
Executed: 2006-06-09
LOWISCH, MARTIN
Executed: 2006-06-13
SINGER, WOLFGANG
Executed: 2006-06-06
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Masks, Lithography Device and Semiconductor Component
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.