Patent Assignment
Reel/Frame 017821/0485
Assignment of Assignor's Interest
Recorded: 2006-04-25
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method, and Program and Storage Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.