Patent Assignment
Reel/Frame 017822/0897
Assignment of Assignor's Interest
Recorded: 2006-06-21
Pages: 4
Assignors
FROSIEN, JUERGEN
Executed: 2006-03-23
DEGENHARDT, RALF
Executed: 2006-03-23
LANIO, STEFAN
Executed: 2006-03-23
Assignee
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT HALBLEITERPRUFTECHNIK MBH
AMMERTHALSTRASSE 20A, HEIMSTETTEN, 85551, GERMANY
Covered Property
(1)
Double Stage Charged Particle Beam Energy Width Reduction System for Charged Particle Beam System