Patent Assignment
Reel/Frame 017837/0401
Assignment of Assignor's Interest
Recorded: 2006-06-23
Pages: 4
Assignors
CHANG, CHING-YU
Executed: 2006-06-12
LIN, CHIN-HSIANG
Executed: 2006-06-14
LIN, BURN JENG
Executed: 2006-06-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method for Forming a Lithography Pattern