Patent Assignment
Reel/Frame 017843/0237
Assignment of Assignor's Interest
Recorded: 2006-05-08
Pages: 2
Assignee
SHARP KABUSHIKI KAISHA
22-22, NAGAIKE-CHO, ABENO-KU, OSAKA-SHI, OSAKA, 545-8522, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Semiconductor Device Manufactured by the Same Apparatus