Patent Assignment
Reel/Frame 017844/0673
Assignment of Assignor's Interest
Recorded: 2006-06-26
Pages: 3
Assignor
VUKOVIC, MIRKO
Executed: 2006-04-14
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107, JAPAN
Covered Property
(1)
Internal Coil with Segmented Shield and Inductively-Coupled Plasma Source and Processing System Therewith