Patent Assignment
Reel/Frame 017850/0388
Assignment of Assignor's Interest
Recorded: 2006-05-01
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Plasma-Assisted Vapor Phase Treatment of Low Dielectric Constant Films Using a Batch Processing System