Patent Assignment
Reel/Frame 017857/0162
Assignment of Assignor's Interest
Recorded: 2006-06-29
Pages: 3
Assignor
CHANG, CHING-YU
Executed: 2006-06-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Structure and Method for Improving Photoresist Pattern Adhesion