Patent Assignment
Reel/Frame 017862/0417
Assignment of Assignor's Interest
Recorded: 2006-05-08
Pages: 2
Assignor
SHAFER, DAVID
Executed: 2006-03-31
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Projection System, in Particular for a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.