Patent Assignment
Reel/Frame 017866/0862
Assignment of Assignor's Interest
Recorded: 2006-06-29
Pages: 4
Assignors
CHANG, CHING-YU
Executed: 2006-06-08
LIN, BURN JENG
Executed: 2006-06-09
LIN, CHIN-HSIANG
Executed: 2006-06-09
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Immersion Lithography Apparatus and Methods