Assignment of Assignor's Interest

Recorded: 2006-06-27 Pages: 2

Assignors

GRUNER, TORALF

Executed: 2006-05-16

DEGUENTHER, MARKUS

Executed: 2006-06-13

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Device for Adjusting the Illumination Dose on a Photosensitive Layer

Patent: 7,551,263 →

Application: 11/409,387 →

Publication: US 2006/0244941

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.