Patent Assignment
Reel/Frame 017871/0297
Assignment of Assignor's Interest
Recorded: 2006-05-05
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method of Processing Substrate, Post-Chemical Mechanical Polishing Cleaning Method, and Method of and Program for Manufacturing Electronic Device