Patent Assignment
Reel/Frame 017872/0284
Assignment of Assignor's Interest
Recorded: 2006-07-03
Pages: 6
Assignors
FUNK, MERRITT
Executed: 2006-06-06
SUNDARARAJAN, RADHA
Executed: 2006-06-06
PRAGER, DANIEL JOSEPH
Executed: 2006-06-06
Assignee
TOKYO ELECTRON, LTD.
3-6, AKASAKA 5-CHOME, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Dynamic Metrology Sampling for a Dual Damascene Process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.