Patent Assignment
Reel/Frame 017874/0422
Assignment of Assignor's Interest
Recorded: 2006-06-29
Pages: 2
Assignor
CLAUSS, WILFRIED
Executed: 2006-06-19
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, D-73446 OBERKOCHEN, GERMANY
Covered Property
(1)
Projection Objective of a Microlithographic Projection Exposure Apparatus and Method for Its Production
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.