Patent Assignment
Reel/Frame 017893/0981
Assignment of Assignor's Interest
Recorded: 2006-05-11
Pages: 2
Assignors
HAINZ, JOACHIM
Executed: 2006-04-24
SINGER, WOLFGANG
Executed: 2006-04-24
SCHUBERT, ERICH
Executed: 2006-04-24
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Illumination System Particularly for Microlithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.