Patent Assignment
Reel/Frame 017898/0993
Assignment of Assignor's Interest
Recorded: 2006-05-16
Pages: 6
Assignor
HUDSON, ERIC
Executed: 2006-03-30
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Tunable uniformity in a plasma processing system