Patent Assignment
Reel/Frame 017901/0617
Assignment of Assignor's Interest
Recorded: 2006-05-11
Pages: 2
Assignor
MATSUBARA, HIDEAKI
Executed: 2006-04-19
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU, 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method of and Substrate Processing Apparatus for Freezing and Cleaning Substrate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.