Patent Assignment
Reel/Frame 017902/0096
Assignment of Assignor's Interest
Recorded: 2006-05-17
Pages: 4
Assignors
VAN HERPEN, MAARTEN MARINUS JOHNNES WILHELMUS
Executed: 2006-04-06
BAKKER, LEVINUS PIETER
Executed: 2006-04-07
BANINE, VADIM YEVGENYEVICH
Executed: 2006-04-13
KLUNDER, DERK JAN WILFRED
Executed: 2006-04-06
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Spectral Purity Filter for a Multi-Layer Mirror, Lithographic Apparatus Including Such Multi-Layer Mirror, Method for Enlarging the Ratio of Desired Radiation and Undesired Radiation, and Device Manufacturing Method