Patent Assignment
Reel/Frame 017903/0227
Assignment of Assignor's Interest
Recorded: 2005-10-24
Pages: 2
Assignors
DOBSCHAL, HANS-JUERGEN
Executed: 2005-10-10
HARNISCH, WOLFGANG
Executed: 2005-10-13
SCHERUEBL, THOMAS
Executed: 2005-10-17
ROSENKRANZ, NORBERT
Executed: 2005-10-10
SEMMLER, RALPH
Executed: 2005-10-10
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Arrangement for Inspecting Objects, Especially Masks in Microlithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.