Patent Assignment
Reel/Frame 017918/0512
Assignment of Assignor's Interest
Recorded: 2006-05-22
Pages: 3
Assignor
LI, YICHENG
Executed: 2006-03-31
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Sealing Device and Method for a Processing System