Patent Assignment
Reel/Frame 017922/0710
Assignment of Assignor's Interest
Recorded: 2006-05-19
Pages: 6
Assignors
CHOI, DONG-HYUN
Executed: 2006-04-02
PARK, MOON-SOO
Executed: 2006-05-03
KIN, JONG-CHUL
Executed: 2006-05-03
KIM, YONG-DAE
Executed: 2006-05-07
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416 MAETAN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Temperature-Adjusting Unit, Substrate Processing Apparatus with the Unit, and Method of Regulating Temperature in the Apparatus