Patent Assignment
Reel/Frame 017925/0604
Assignment of Assignor's Interest
Recorded: 2006-07-13
Pages: 5
Assignors
OSAWA, HIROSHI
Executed: 2006-07-06
OHKUBO, AKINORI
Executed: 2006-07-06
YAMAZOE, KENJI
Executed: 2006-07-06
Assignee
CANON KABUSHIKI KAISHA
3-30-2 SHIMOMARUKO, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Exposure Apparatus Comprising Cleaning Apparatus for Cleaning Mask with Laser Beam