Patent Assignment
Reel/Frame 017932/0517
Assignment of Assignor's Interest
Recorded: 2006-07-12
Pages: 2
Assignors
KASAHARA, OSAMU
Executed: 2006-04-11
MAEDA, KIYOHIKO
Executed: 2006-04-12
YONEDA, AKIHIKO
Executed: 2006-04-13
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTO-KANDA 4-CHOME,, CHIYODA-KU, TOKYO 101-8980,, JAPAN
Covered Property
(1)
Manufacturing Method of Semiconductor Device, and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.