Patent Assignment
Reel/Frame 017932/0537
Assignment of Assignor's Interest
Recorded: 2006-07-12
Pages: 3
Assignors
LALLY, KEVIN
Executed: 2006-06-09
FUNK, MERRITT
Executed: 2006-06-09
SUNDARARAJAN, RADHA
Executed: 2006-06-09
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107, JAPAN
Covered Property
(1)
Measuring a Damaged Structure Formed on a Wafer Using Optical Metrology