Patent Assignment
Reel/Frame 017948/0959
Assignment of Assignor's Interest
Recorded: 2006-05-23
Pages: 2
Assignors
WATANABE, MASAHIRO
Executed: 2006-04-11
NAKATA, TOSHIHIKO
Executed: 2006-04-12
TANAKA, MAKI
Executed: 2006-04-12
Assignee
HITACHI, LTD.
6-6, MARUNOUCHI 1-CHOME, CHIYODA-KU, TOKYO 100-8220, JAPAN
Covered Property
(1)
Three-Dimensional Shape Measuring Unit, Processing Unit, and Semiconductor Device Manufacturing Method