Patent Assignment
Reel/Frame 017954/0531
Assignment of Assignor's Interest
Recorded: 2005-11-30
Pages: 3
Assignors
GOTO, TOSHIO
Executed: 2005-11-18
HORI, MASARU
Executed: 2005-11-18
ISHII, NOBUO
Executed: 2005-11-18
DEN, SHOJI
Executed: 2005-11-18
Assignees
TOSHIO GOTO
3-2110, GOSHIKIEN, NISSHIN-SHI, AICHI 470-0105, JAPAN
MASARU HORI
6-176, FUJITSUKA, NISSHIN-SHI, AICHI 470-0100, JAPAN
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
KATAGIRI ENGINEERING CO., LTD.
37-12, MINAMIKASE 5-CHOME, SAIWAI-KU, KAWASAKI-SHI, KANAGAWA 212-0055, JAPAN
Covered Property
(1)
Plasma Source and Plasma Processing Apparatus