Patent Assignment
Reel/Frame 017954/0718
Assignment of Assignor's Interest
Recorded: 2006-06-02
Pages: 3
Assignor
DENPOH, KAZUKI
Executed: 2006-05-17
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Electron Temperature Measurement Method, Electron Temperature Measurement Program for Implementing the Method, and Storage Medium Storing the Electron Temperature Measurement Program