Patent Assignment
Reel/Frame 017955/0774
Assignment of Assignor's Interest
Recorded: 2006-07-17
Pages: 3
Assignors
CHEBI, ROBERT P.
Executed: 2006-05-22
WINNICZEK, JAROSLAW W.
Executed: 2006-05-22
MILLER, ALAN J.
Executed: 2006-05-23
LO, GLADYS S.
Executed: 2006-05-23
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Photoresist Stripping Chamber and Methods of Etching Photoresist on Substrates