Patent Assignment
Reel/Frame 017958/0496
Assignment of Assignor's Interest
Recorded: 2006-06-02
Pages: 3
Assignor
LI, YICHENG
Executed: 2006-05-19
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Exhaust System for a Vacuum Processing System