Patent Assignment
Reel/Frame 017965/0490
Assignment of Assignor's Interest
Recorded: 2006-06-05
Pages: 4
Assignors
TOKUNO, YOSHICHIKA
Executed: 2006-03-02
ITO, NORIHIRO
Executed: 2006-03-02
ORII, TAKEHIKO
Executed: 2006-03-07
NAKAMORI, MITSUNORI
Executed: 2006-03-07
IINO, TADASHI
Executed: 2006-03-07
OHNO, HIROKI
Executed: 2006-03-13
SAITO, YUSUKE
Executed: 2006-03-07
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Ozone Processing Apparatus and Ozone Processing Method