Patent Assignment
Reel/Frame 017981/0386
Assignment of Assignor's Interest
Recorded: 2006-06-07
Pages: 3
Assignors
KEIL, DOUGLAS
Executed: 2006-05-31
HUDSON, ERIC
Executed: 2006-05-31
KIMBALL, CHRIS
Executed: 2006-05-31
FISCHER, ANDREAS
Executed: 2006-06-05
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method and Apparatus to Detect Fault Conditions of Plasma Processing Reactor