Patent Assignment
Reel/Frame 017985/0449
Assignment of Assignor's Interest
Recorded: 2006-06-12
Pages: 3
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Light Exposure Apparatus and Manufacturing Method of Semiconductor Device Using the Same