Assignment of Assignor's Interest

Recorded: 2006-06-12 Pages: 3

Assignors

TOTZECK, MICHAEL

Executed: 2006-05-02

FELDMANN, HEIKO

Executed: 2006-04-27

KRAEHMER, DANIEL

Executed: 2006-03-29

DITTMANN, OLAF

Executed: 2006-05-12

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY

Covered Property (1)

Method for Describing, Evaluating and Improving Optical Polarization Properties of a Microlithographic Projection Exposure Apparatus

Patent: 7,728,975 →

Application: 11/358,119 →

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.