Patent Assignment
Reel/Frame 018006/0977
Assignment of Assignor's Interest
Recorded: 2006-06-14
Pages: 2
Assignor
YAMADA, TORU
Executed: 2006-05-18
Assignee
SHIN-ETSU HANDOTAI CO., LTD.
4-2, MARUNOUCHI 1-CHOME, CHIYODA-KU, TOKYO 100-0005, JAPAN
Covered Property
(1)
Vapor phase growth apparatus and method of fabricating epitaxial wafer