Patent Assignment
Reel/Frame 018016/0579
Assignment of Assignor's Interest
Recorded: 2006-06-27
Pages: 4
Assignors
KAWAKUBO, MASAHARU
Executed: 2006-05-26
KANAYA, YUHO
Executed: 2006-05-26
NAKAGAWA, CHIAKI
Executed: 2006-05-26
KIKUCHI, TAKAHISA
Executed: 2006-06-06
AKIZUKI, MASAHIKO
Executed: 2006-05-26
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME CHIYODA-KU, TOKYO 100-8331, JAPAN
Covered Property
(1)
Exposure Method and Device Manufacturing Method, Exposure Apparatus, and Program