Patent Assignment
Reel/Frame 018027/0212
Assignment of Assignor's Interest
Recorded: 2006-06-22
Pages: 3
Assignor
KIKUCHI, AKIHIRO
Executed: 2006-06-12
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Plasma Etching Method and Apparatus, Control Program and Computer-Readable Storage Medium Storing the Control Program