Patent Assignment
Reel/Frame 018043/0350
Assignment of Assignor's Interest
Recorded: 2006-08-02
Pages: 5
Assignors
TROOST, KARS ZEGER
Executed: 2006-07-28
BASELMANS, JOHANNES JACOBUS MATHEUS
Executed: 2006-07-28
GREENEICH, JAMES SHERWOOD
Executed: 2006-07-21
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus and Device Manufacturing Method Using Interferometric and Other Exposure