Patent Assignment
Reel/Frame 018060/0867
Change of Name
Recorded: 2006-06-30
Pages: 5
Assignor
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Executed: 2002-08-27
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Optical Component and Coating System for Coating Substrates for Optical Components
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.