Patent Assignment
Reel/Frame 018070/0558
Assignment of Assignor's Interest
Recorded: 2006-07-03
Pages: 3
Assignor
MATSUURA, HIROYUKI
Executed: 2006-06-28
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method for Forming Silicon Oxynitride Film