Patent Assignment
Reel/Frame 018085/0755
Assignment of Assignor's Interest
Recorded: 2005-11-04
Pages: 3
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO 144-8510, JAPAN
Covered Property
(1)
Substrate Holding Apparatus and Polishing Apparatus