Patent Assignment
Reel/Frame 018088/0807
Assignment of Assignor's Interest
Recorded: 2006-07-06
Pages: 3
Assignors
KINSHO, TAKESHI
Executed: 2006-06-08
WATANABE, TAKERU
Executed: 2006-06-08
NAKASHIMA, MUTSUO
Executed: 2006-06-08
HAMADA, YOSHITAKA
Executed: 2006-06-08
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Fluorinated Cyclic Structure-Bearing Silicon Compounds and Silicone Resins, Resist Compositions Using the Same, and Patterning Process