Patent Assignment
Reel/Frame 018114/0083
Assignment of Assignor's Interest
Recorded: 2006-07-18
Pages: 3
Assignors
MARAKHTANOV, ALEXEI
Executed: 2006-07-11
DHINDSA, RAJINDER
Executed: 2006-07-17
HUDSON, ERIC
Executed: 2006-07-12
FISCHER, ANDREAS
Executed: 2006-07-12
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Hybrid Rf Capacitively and Inductively Coupled Plasma Source Using Multifrequency Rf Powers and Methods of Use Thereof