Patent Assignment
Reel/Frame 018127/0449
Assignment of Assignor's Interest
Recorded: 2006-07-24
Pages: 2
Assignor
SINGH, MANDEEP
Executed: 2006-07-03
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501; NL-5504 DR, VELDHOVEN, NETHERLANDS
Covered Property
(1)
Methods to Clean a Surface, a Device Manufacturing Method, a Cleaning Assembly, Cleaning Apparatus, and Lithographic Apparatus