Patent Assignment
Reel/Frame 018129/0741
Assignment of Assignor's Interest
Recorded: 2006-07-25
Pages: 2
Assignors
LEE, YOUNG-DONG
Executed: 2006-07-12
KOSSYI, IGOR ANTONOVICH
Executed: 2006-07-12
MISAKYAN, MAMIKON ARAMOVICH
Executed: 2006-07-12
TAKTAKISHVILI, MERAB IVANOVICH
Executed: 2006-07-12
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416, MAETAN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Microwave Resonance Plasma Generating Apparatus and Plasma Processing System Having the Same