Patent Assignment
Reel/Frame 018154/0288
Assignment of Assignor's Interest
Recorded: 2006-08-22
Pages: 4
Assignees
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, D-73447, GERMANY
ASML NETHERLANDS B.V.
DE RUN 6665, VELDHOVEN, NL-5504-DT, NETHERLANDS
Covered Property
(1)
Optical Apparatus for Use in Photolithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.