Patent Assignment
Reel/Frame 018181/0225
Assignment of Assignor's Interest
Recorded: 2006-08-11
Pages: 5
Assignors
CLARKE, MICHAEL
Executed: 2006-08-08
MCLOUGHLIN, ROBERT F.
Executed: 2006-08-08
LAVERDIERE, MARC
Executed: 2006-08-08
Assignee
ENTEGRIS, INC.
3500 LYMAN BLVD., CHASKA, MINNESOTA, 55318
Covered Property
(1)
Systems and Methods for Fluid Flow Control in an Immersion Lithography System
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
Mar 9, 2009
From: ENTEGRIS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 022354/0784 →
Change of Address
Sep 20, 2010
From: ENTEGRIS, INC.
To: ENTEGRIS, INC.
Reel/Frame 025017/0095 →
Release of Security Interest
Aug 17, 2011
From: WELLS FARGO BANK NATIONAL ASSOCIATION
To: ENTEGRIS, INC.
Reel/Frame 026764/0880 →