Patent Assignment
Reel/Frame 018182/0529
Assignment of Assignor's Interest
Recorded: 2006-08-15
Pages: 7
Assignors
RAKHIMOVA, TATYANA VICTOROVNA
Executed: 2006-05-02
BANINE, VADIM YEVGENYEVICH
Executed: 2006-05-29
IVANOV, VLADIMIR VITALEVITCH
Executed: 2006-06-10
KOSHELEV, KONSTANTIN NIKOLAEVITCH
Executed: 2006-05-22
MOORS, JOHANNES HUBERTUS JOSEPHINA
Executed: 2006-05-29
KOVALEV, ALEKSANDER SERGEEVICH
Executed: 2006-05-02
LOPAEV, DMITRIY VICTOROVICH
Executed: 2006-05-02
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus Comprising an Electrical Discharge Generator and Method for Cleaning an Element of a Lithographic Apparatus