Patent Assignment
Reel/Frame 018208/0881
Assignment of Assignor's Interest
Recorded: 2006-08-09
Pages: 13
Assignors
SINGER, WOLFGANG
Executed: 2006-05-03
WIETZORREK, JOACHIM
Executed: 2006-05-24
HAINZ, JOACHIM
Executed: 2006-04-26
WEIRAUCH, GABRIELE
Executed: 2006-05-24
MAUL, MANFRED
Executed: 2006-05-06
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Illumination System for Microlithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.